Description
The SlurriGard™ DUO3 is a breakthrough CMP Filter Design that caters to advanced CMP processes in Slurry Delivery System and Bulk Slurry Chemical Manufacturing. The DUO3 has a Upstream 3D Melt-Blown layer and a Downstream Wrapped Nano Fibre layer.
Disruptive particles like gels and agglomerates will be effectively captured at the Upstream layers while the Downstream layers provide for optimized retention of fine contaminants while allowing working slurry particles to come through with ease. This effectively reduced large particles on all slurry types of ceria, colloidal or fumed silica delivering consistent performance for all bulk slurry chemicals.
The Mycropore CMP Product Management team can assist you in the application of a suitable and effective CMP filter that will meet the desired outcomes of your CMP process. We have proven experience in optimized performance cartridge filters for Bulk Slurry Chemical Delivery and Manufacturing applications.
