Description
ShinoFlo™ AT– filters are superior pleated Hydrophobic PTFE (Polytetrafluoroethylene) membrane with PFA support for critical chemical applications. It’s large surface areas enabled longer filter life and improve flow performances. This filter effectively removes particles from a wide range of acids, bases and solvents and other process chemicals. It is applicable for use with process chemicals that are aggressive and operating under high temperature conditions.
ShinoFlo™ AT– comes with Ultra Clean Options for Low Metal Extractable (UL) of < 10ppb and Ultra High Purity (UHP) at < 30 ppb
ShinoFlo™ AT– filter is EzeLock™ Key ready and compatible for use with ChemLock® PFA & EzeLock™ PFA housings
1.Applicable in semiconductor wet etch, clean and stripper.
2.Bulk chemical delivery system and chemical manufacturing
