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DISPOSABLE CAPSULE FILTER

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Microchem™-II D series disposable filters offer high-performance membranes for critical high purity photochemical point-of-use filtration applications:

Hydrophilic PES membrane for DIW and positive developer
Hydrophobic PTFE membrane for aggressive solvent-based photochemical
Nylon membrane for the removal of micro, soft gel and particles present in advanced photoresist
UPE membrane for point of use photoresist that are PGMEA-base or solvent-based photoresist.
PP membrane for general point of use in photoresist and air tank vent filtration.

Microchem™ II D series disposable capsules can also be used in point of use or point of tool of other process chemistries.

Point-of-Use (POU) application for the following

MCTD-PS : Positive Developer (KOH,TMAH) and DI water

MCTD-PF : IPA, Acetone, EBR, OK73 and other solvents

MCTD-PN & PU : Photoresist PGMEA-based, advanced EUV, 157nm; and 18.2MΩ DIW pre-flushed version for DUV-ArF-193nm and DUV-KrF-248nm photoresist filtration

MCTD-PP : TFT LCD, compound semiconductor photoresist and for air tank vent filtration

DISPOSABLE CAPSULE FILTER

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