DEVELOPER / DI / SOLVENT / PHOTOCHEMICAL CAPSULE FILTER

PanaLifeGard™123 (PLG123) series filter change-out is as easy as 123.

Advanced POU filtration platform that accommodates advanced and mass production proven

• Highly Asymmetric PES membrane filter for aqueous-based Developer / DIW and megasonic clean
• UPE, Nylon and PTFE membrane filter for photochemical and solvent filtration.

PanaLifeGard™123 is a “Plug-and-Play” replacement for use with TEL*, DNS* photochemical spin coating tool, as well as AMAT* tool for post CMP clean.  Applicable for POU use with TMAH, DHF, NH₄OH, DIW

PanaLifeGard™123 can be installed in Standard Manifold available. Mycropore has a Standard Mini Manifold that is specially designed for space savings considerations.

Cleanliness options are available.