• Mycropore Corporation is a leading provider
    of micro-contamination control products
    and solutions serving the semi-conductor
    and related micro-electronics industries

Mycropore’s ultra high purity products are tested and evaluated carefully in its Mycropore Application & Technology Development Laboratory (MATD) which is equipped with advanced instruments and operated by competent doctorate and professionally trained staff.

BP / Integrity Test Millipore
Particle Challenge / Retention Test Stand
Particle Counter 40nm and below
Particle Sizer AccuSizer FX-NANO
ICP-MS PPB and PPT level
SEM / EDS

Our Products

Facility Delivery System / Slurry Manufacturing

SlurriGard N, PS, PD Cartridge Filter

Features: Low particle & fibre shedding, Low metal extractable

Benefits: Process improvement, Cost Reduction

Additional Information: 0.05um, 0.07um, 0.1um, 0.2um, 0.3um, 0.5um, 0.7um, 1um, 3um, 5um, 7um, 9um

Equipment - POU (Point of Use Filter)

SlurriGard N, PS, PD Disposable

Features: Improves particle retention, Faster start-up, Slurry savings

Benefits: Process improvement, Cost Reduction

Additional Information: 0.05um, 0.07um, 0.1um, 0.2um, 0.3um, 0.5um, 0.7um, 1.0um, ECX2-5”-PD, ECX2-5”, ECP, EC2L-10”

Options: Standard, Preflushed/Dry or Patented IPWetTM Technology

Patented IPWet technology Package CMP Filters

Megasonic Cleaner or Dilute HF Buffered Oxide Etch

BuffaEtchTM - HP / HPX

Features: Highly asymmetric PES with PP support

Benefits: Excellent retention, Excellent flow, Hydrophilic, High purity

Additional Information: Cartridge Filter 0.05um, 0.1um Available in 20nm

Dilute HF Filter

DiluEtchGardTM - HP / HPX

Features: Highly asymmetric PES hydrophilic membrane with HDPE support

Benefits: Retention up to 10nm particles, High flow, Low pressure drop, Meets demand of 20nm technology node

Additional Information: Cartridge Filter 10nm, 20nm, 30nm, 50nm

Chemical Delivery System

All Teflon® Filter - Aggressive & High Temperature Applications, FluoroFlo - II AT / ATX / AT2 / AT3*

Features: All PTFE membrane with PFA support

Benefits: Broad chemical compatibility, PreWet version available, High flow, Long lifetime, Low pressure drop

Additional Information: Cartridge Filter 30nm 0.05um, 0.1um

PVD Electro Copper Plating Filter

CoopaGard - II HPX

Features: Highly asymmetric PES hydrophilic membrane with HDPE support, Option of advanced hydrophilic PTFE membrane available*

Benefits: Broad chemical compatibility, High flow, Low pressure drop, Low pressure drop

Additional Information: Cartridge Filter 0.05um, 0.1um

ST-2xx Stripper Filter

BuffaEtch -II HP / HPX

Features: Highly asymmetric PES hydrophilic membrane with PP support

Benefits: Retention up to 10nm particles, High flow, Low pressure drop, Meets demand of 20nm technology node

Additional Information: Cartridge Filter 0.05um

DI Water and Developer

Microchem - D DEV / DI

Features: Highly asymmetric PES membrane with PP Support

Benefits: Excellent retention, Excellent flow, Spontaneous hydrophilic, High purity

Additional Information: Disposable Filter 20nm, 30nm, 0.05um, 0.1um

Patented EzeLiv ST DEV / DI Photo Filter


Features: Highly hydrophilic PES membrane for DEV / DI filtration, Patented disposable filter used with existing manifold, Backward compatible

Benefits: Eliminate micro-bubbles in DEV/ DI filtration, Easy to begin qualification, Low risk

Patented MicroGen - HV 2-Stage Dispense Pump


Features: Enables high accuracy and repeatable dispense of polyimide for high viscosity, high purity fluids.

Benefits: Bubble elimination, Polyimide savings, High accuracy, Long lifetime, Low pressure drop

QBX / QBX2


Features: QuickBubbleX removes micro and macro-bubbles from start-up, and eliminate micro-bubbles recirculation, Takes < 30 minutes to remove bubbles from RGEN-01 & RGEN-02 pumps (usually takes 3 to 6 hours)

Benefits: Easy to install, Reduced cost and labour, Reduced chemical, manpower and tool time, See immediate results, No need to completely upgrade pump

EzeLock® - PFA Ultra High Purity Filter Housing


Features: Space saving EzeLock design, High purity Dupont PFA 440HPJ, Made in Japan

Benefits: Compatible with Exx Chemlock*, EzeLock® and standard 2-222 filter cartridge, Ultra clean highest purity applications, EPA compliance PFOA-Free, Low pressure drop

Additional Information: Cartridge Filter Housing 5in, 10in, 20in

Option: 1” Pillar# S300 I/O, 1/2” V/D, 1” Flaretek* I/O, 1/2” V/D, PVDF locking ring; PP locking ring

Patented EzeLock® Design

Photochemical Filter

PanaLifeGard-NL

Features: Nylon membrane filter with high purity PP support

Benefits: Broad chemical compatibility TFT PR, Excellent particle and gel retention, Optimized flow, low pressure drop.

Additional Information: Nylon 0.1, 0.2um

POU TFT PR Filter

PanaLifeGard -D Capsule Filter

Features: PTFE, High Dirt Capacity PP media membrane, Options of Super Pillar, SWG and other I/O, V/D fittings

Benefits: Excellent retention of particles and gels, Optimized flow & low pressure drop, Leak-free and bubble free POU dispense

Additional Information: PTFE 0.1, 0.2, 0.5um, PP 0.3, 0.6, 1.2, 2.5, 5, 10um

POD Filter

MicroDisk -50 Disc Filter

Features: PTFE membrane with HDPE support and shell, or High Dirt Capcity PP media, Options of Super Pillar, PT I/O, V/D fittings

Benefits: Excellent retention of particles and gels, Low hold-up volume, Leak-free and bubble free POU dispense

Additional Information: PTFE 0.1, 0.2, 0.5um, PP 0.3, 0.6, 1.2, 2.5, 5, 10um

Facility Delivery System / Slurry Manufacturing

SlurriGard N, PS, PD Cartridge Filter

Features: Low particle & fibre shedding, Low metal extractable

Benefits: Process improvement, Cost Reduction

Additional Information: 0.05um, 0.07um, 0.1um, 0.2um, 0.3um, 0.5um, 0.7um, 1um, 3um, 5um, 7um, 9um

Equipment - POU (Point of Use Filter)

SlurriGard N, PS, PD Disposable

Features: Improves particle retention, Faster start-up, Slurry savings

Benefits: Process improvement, Cost Reduction

Additional Information: 0.05um, 0.07um, 0.1um, 0.2um, 0.3um, 0.5um, 0.7um, 1.0um, ECX2-5”-PD, ECX2-5”, ECP, EC2L-10”

Options: Standard, Preflushed/Dry or Patented IPWetTM Technology

Patented IPWet technology Package CMP Filters

Megasonic Cleaner or Dilute HF Buffered Oxide Etch

BuffaEtchTM - HP / HPX

Features: Highly asymmetric PES with PP support

Benefits: Excellent retention, Excellent flow, Hydrophilic, High purity

Additional Information: Cartridge Filter 0.05um, 0.1um Available in 20nm

Dilute HF Filter

DiluEtchGardTM - HP / HPX

Features: Highly asymmetric PES hydrophilic membrane with HDPE support

Benefits: Retention up to 10nm particles, High flow, Low pressure drop, Meets demand of 20nm technology node

Additional Information: Cartridge Filter 10nm, 20nm, 30nm, 50nm

Chemical Delivery System

All Teflon® Filter - Aggressive & High Temperature Applications, FluoroFlo - II AT / ATX / AT2 / AT3*

Features: All PTFE membrane with PFA support

Benefits: Broad chemical compatibility, PreWet version available, High flow, Long lifetime, Low pressure drop

Additional Information: Cartridge Filter 30nm 0.05um, 0.1um

PVD Electro Copper Plating Filter

CoopaGard - II HPX

Features: Highly asymmetric PES hydrophilic membrane with HDPE support, Option of advanced hydrophilic PTFE membrane available*

Benefits: Broad chemical compatibility, High flow, Low pressure drop, Low pressure drop

Additional Information: Cartridge Filter 0.05um, 0.1um

ST-2xx Stripper Filter

BuffaEtch -II HP / HPX

Features: Highly asymmetric PES hydrophilic membrane with PP support

Benefits: Retention up to 10nm particles, High flow, Low pressure drop, Meets demand of 20nm technology node

Additional Information: Cartridge Filter 0.05um

DI Water and Developer

Microchem - D DEV / DI

Features: Highly asymmetric PES membrane with PP Support

Benefits: Excellent retention, Excellent flow, Spontaneous hydrophilic, High purity

Additional Information: Disposable Filter 20nm, 30nm, 0.05um, 0.1um

Patented EzeLiv ST DEV / DI Photo Filter


Features: Highly hydrophilic PES membrane for DEV / DI filtration, Patented disposable filter used with existing manifold, Backward compatible

Benefits: Eliminate micro-bubbles in DEV/ DI filtration, Easy to begin qualification, Low risk

Patented MicroGen - HV 2-Stage Dispense Pump


Features: Enables high accuracy and repeatable dispense of polyimide for high viscosity, high purity fluids.

Benefits: Bubble elimination, Polyimide savings, High accuracy, Long lifetime, Low pressure drop

QBX / QBX2


Features: QuickBubbleX removes micro and macro-bubbles from start-up, and eliminate micro-bubbles recirculation, Takes < 30 minutes to remove bubbles from RGEN-01 & RGEN-02 pumps (usually takes 3 to 6 hours)

Benefits: Easy to install, Reduced cost and labour, Reduced chemical, manpower and tool time, See immediate results, No need to completely upgrade pump

EzeLock® - PFA Ultra High Purity Filter Housing


Features: Space saving EzeLock design, High purity Dupont PFA 440HPJ, Made in Japan

Benefits: Compatible with Exx Chemlock*, EzeLock® and standard 2-222 filter cartridge, Ultra clean highest purity applications, EPA compliance PFOA-Free, Low pressure drop

Additional Information: Cartridge Filter Housing 5in, 10in, 20in

Option: 1” Pillar# S300 I/O, 1/2” V/D, 1” Flaretek* I/O, 1/2” V/D, PVDF locking ring; PP locking ring

Patented EzeLock® Design

Photochemical Filter

PanaLifeGard-NL

Features: Nylon membrane filter with high purity PP support

Benefits: Broad chemical compatibility TFT PR, Excellent particle and gel retention, Optimized flow, low pressure drop.

Additional Information: Nylon 0.1, 0.2um

POU TFT PR Filter

PanaLifeGard -D Capsule Filter

Features: PTFE, High Dirt Capacity PP media membrane, Options of Super Pillar, SWG and other I/O, V/D fittings

Benefits: Excellent retention of particles and gels, Optimized flow & low pressure drop, Leak-free and bubble free POU dispense

Additional Information: PTFE 0.1, 0.2, 0.5um, PP 0.3, 0.6, 1.2, 2.5, 5, 10um

POD Filter

MicroDisk -50 Disc Filter

Features: PTFE membrane with HDPE support and shell, or High Dirt Capcity PP media, Options of Super Pillar, PT I/O, V/D fittings

Benefits: Excellent retention of particles and gels, Low hold-up volume, Leak-free and bubble free POU dispense

Additional Information: PTFE 0.1, 0.2, 0.5um, PP 0.3, 0.6, 1.2, 2.5, 5, 10um